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Microelectromechanical systems (MEMS) for in vivo applications

A. Vasudev and S. Bhansali,     Florida International University, USA

Abstract:

This chapter discusses the application of microelectromechanical systems (MEMS) technology in the development of implantable medical devices. A brief introduction on MEMS technology is followed by a premise for the need of MEMS-based implantable devices. The chapter is structured into MEMS sensors (pressure, stress and strain, inertia) and MEMS actuators (drug delivery, electrical stimulators) and their applications in vivo. Recent research efforts in developing implantable MEMS devices are also discussed for each device described. A brief rundown on the challenges faced due to biocompatibility ...

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