Preface
Integrated microsystems are intelligent miniaturized devices and systems, fabricated using processes compatible with CMOS integrated circuits, which combine computation, communications, sensing, and actuation. Integrated microsystems represent a rapidly growing field, embracing developments in electronics, photonics, mechanics, chemistry, and biology. They might include emerging devices fabricated in nanotechnology, microelectromechanical systems (MEMS), or microfluidics. Their presence is widespread in everyday life—although frequently we might not realize that we are dealing with integrated microsystems when using Wii videogames, hearing aids, or pacemakers.
The demand for portable and lightweight microsystems is relentless, filling ...
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