Fabrication Aspects of Integrated Devices
This chapter reviews some of the fabrication techniques to be used for realization of the integrated nanophotonic devices. Nanofabrication technologies are applied for the manufacture of nanoscale devices applicable to fields of research such as microelectronics or nanophotonics. Usually, the fabricated devices are made out of semiconductor materials, dielectrics, oxides, and metals. Most of the manufacturing processes of nanoscale devices consist of two basic stages—formation of an image on a surface of a material and processing and patterning the surface. In general, image formation on a surface of a chip may be obtained by means of deposition of a layer of a photosensitive material—photo-resist, ...
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