8 Integrated Power Semiconductor Devices with TCAD Simulation
This chapter explores the devices used in power ICs with the help of technology computer-aided design (TCAD) simulation. For the sake of simplicity, in this chapter, we will use only a device simulator (e.g., APSYS) to define structures and doping concentrations and to perform device electrical and thermal simulations. The next chapter contains examples that are simulated with both process and device simulators (e.g., CSUPREM and APSYS).
8.1 PN Junction Diodes
Diodes are widely used in analog and power ICs, even though synchronous rectification is now replacing diodes for many applications. Since a PN junction laterally integrated diode is a fundamental building block for most power ...
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