3

Sources, Detectors, and Recording Media

3.1    INTRODUCTION

This chapter deals with the sources of radiation and the detectors that are used in optical metrology. The light incident on the object is to be measured. Radiometry refers to the measurement of radiation. This includes the wavelength range from 10 nm to 1,000 μm, the regions commonly called ultraviolet, visible, and infrared. On the other hand, photometry refers to the detection of light in the visible spectrum, that is, the part of the electromagnetic spectrum to which the eye is sensitive. This corresponds to the wavelengths in the range from 360 nm to 830 nm. Radiometry includes the complete optical spectrum, whereas photometry is limited to the visible spectrum as defined ...

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