We have seen in Chapter 4 as micro-fabrication technologies originally introduced for microelectronics and integrated optics are a suitable set of techniques to obtain labs on chip starting from SiO2 on Si or fully SiO2 wafers. The excellent mechanical and chemical properties of glass, the large number of planar structures, and MEMs that can be built from silicon, besides the wide and complex set of techniques at the designer disposal, allow complex labs on chip to be developed with a fabrication cost model suitable for very large-scale production.
This technology reveals its limits when very large-scale production is not needed, and in any case in the research phase, when a very complex technology ...
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