Multiphoton lithography, processing and fabrication of photonic structures
J. Fourkas, University of Maryland, USA
Abstract:
This chapter discusses the use of multiphoton fabrication techniques to create two- and three-dimensional photonic devices. After reviewing the basic principles of multiphoton lithography, the materials that can be patterned with multiphoton techniques are introduced. Examples of photonic devices created with multiphoton lithography are then presented, followed by a discussion of future prospects for multiphoton fabrication techniques in photonics.
Key words
nonlinear optics
multiphoton absorption
photonic crystals
waveguides
5.1 Introduction to multiphoton lithography
New applications in photonics are increasingly ...
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