Fabrication of periodic submicrometer and micrometer arrays using laser interference-based methods
A.F. Lasagni1,2; E. Beyer1,2 1 Fraunhofer Institute for Material and Beam Technology (IWS), Dresden, Germany2 Technische Universität Dresden, Dresden, Germany
Abstract
Recent advancements in patterning technologies have considerably enhanced the ability to control both surface chemistry and topography of various materials at the microscale, thus allowing material properties to be tailored. Although several methods have been developed to fabricate complex 2-D and 3-D structures, many of them show significant limitations, such as low fabrication speed and flexibility. Laser interferometric techniques permit us to overcome these limitations ...
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