18 Multiaxis Linear PM Motor Drives
By multiaxis linear PM motor drives (M-LPMDs), we mean here small power devices that produce either long stroke xy (planar) motion with small rotation, without or with active z levitation (vertical) motion—along axis z—control, or x, y, z (3D) controlled short displacements with precision in the micro- to nanometer range.
Typical applications are pick and place machines, inspection systems, and fabrication of small objects (when nanometer precision is necessary).
Such applications have been and could be “covered” by using multiple rotary PM electric motors with adequate mechanical transmissions such as lead screws, which, however, suffer from lost motion, stick-slip, and wind-up.
To prevent backlash and dry ...
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