Materials Science of Thin Films, 2nd Edition

Preface

Technological progress and scientific advances often proceed with different time constants. While the former is often shorter than the latter, they nevertheless march forward in a coupled rhythm. This is perhaps nowhere better illustrated than in thin-film science and technology. And that is why even though much of the subject matter of this book has been dramatically updated, its spirit has remained that of the first edition of Materials Science of Thin Films, which appeared a decade ago. Documenting and interpreting the remarkable technological progress of the intervening years in terms of the underlying, largely unchanging physical and chemical sciences remains an invariant feature of this revised edition.

Thin-film microelectronics ...