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Materials Science of Thin Films, 2nd Edition by Milton Ohring

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Chapter 12 Mechanical Properties of Thin Films

12.1 INTRODUCTION

Interest in mechanical-property effects in thin films has traditionally focused on two broad issues. The primary one has been the deleterious effects that stresses cause in films. This has prompted much research to determine the type, magnitude, and origin of stress as well as means of minimizing or controlling stresses. A second major issue concerns enhancing the hardness and wear resistance of assorted coatings. Of the two issues, the first has historically generated the greatest scientific attention and is the one primarily addressed in this chapter. On the other hand, the mechanical properties of metallurgical and protective coatings are important technologically and are the ...

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