1

Introduction

1.1  Cleanroom Technology

To start with cleanroom technology, it is customary to understand the concept of cleanroom first. A cleanroom is where the intensity of bulk airborne particles can be controlled in a typical fashion. The controlling of the rate of airflow and its direction, temperature, relative humidity and pressure is required to have a cleanroom. Sub-micrometre-level airborne particles generally come from people, process, equipment, etc. A special filtering system is essential to have a cleanroom.

There are some strict protocols and methods in developing a cleanroom from its basic design level up to the construction phase. Obviously, a major user of cleanrooms is the semiconductor industry, but it is also used in ...

Get MEMS and Nanotechnology for Gas Sensors now with the O’Reilly learning platform.

O’Reilly members experience books, live events, courses curated by job role, and more from O’Reilly and nearly 200 top publishers.