MEMS and Nanotechnology for Gas Sensors

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Introduction

1.1  Cleanroom Technology

To start with cleanroom technology, it is customary to understand the concept of cleanroom first. A cleanroom is where the intensity of bulk airborne particles can be controlled in a typical fashion. The controlling of the rate of airflow and its direction, temperature, relative humidity and pressure is required to have a cleanroom. Sub-micrometre-level airborne particles generally come from people, process, equipment, etc. A special filtering system is essential to have a cleanroom.

There are some strict protocols and methods in developing a cleanroom from its basic design level up to the construction phase. Obviously, a major user of cleanrooms is the semiconductor industry, but it is also used in ...