MEMS and Nanotechnology for Gas Sensors

2

Substrate for MEMS

2.1  Introduction

Microelectromechanical system (MEMS) is a triumph of twenty-first centuries and revolutionized the semiconductor industry by combining the microelectronics with micromachining technology. Though the term ‘mechanical’ is associated with MEMS, but in true sense, micromachined devices should not contain mechanical part always. But the purpose of MEMS technology is miniaturization that is needed to be addressed. Basically, MEMS is a platform on top of which some common microscopic mechanical parts, e.g. channels, holes, cantilevers, membranes, cavities and other structures, can be fabricated. Though micromachining is associated with MEMS, still the structures are not machined. Rather they are created using ...