9

Nanocrystalline ZnO-Based Microfabricated Chemical Sensor

9.1  Introduction

At present time, solid-state gas sensors based on semiconducting sensing materials represent a viable solution for an increasing number of applications, ranging from health care and safety to quality control in industrial processes. The necessity of sensors with improved performances leads to continuous research efforts aiming at the optimization of sensing materials, of device design and of the operating modes. Temperature is one of the main factors, which determine the sensitivity, selectivity and response time of sensors [1].

Low power consumption is a fundamental requirement for a sensor system with an acceptable battery lifetime. Conventional metal oxide gas ...

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