This chapter discusses a micromechanical machining technique based on the orbital motion of the diamond tip. The chapter first describes its principle and establishment of the setup based on this idea. The chapter then studies the micromachining mechanism, the formation mechanism, and control methods of burrs and effects of the processing parameters, and then it gives the examples of fabricating typical microstructures. Finally, some future works are included.
Orbital motion; diamond tip; micromachining; micromilling
The microfluidic technique ...