Microfabrication and Precision Engineering

6

Microchannel fabrication via direct laser writing

S. Prakash and S. Kumar,    Indian Institute of Technology Patna, Bihar, India

Abstract

Lasers are fascinating tools for fabrication where an intense light is focused over a tiny spot to remove material, either by the process of heating or by intense energy excitations on the surface causing bonds between molecules to break. In both the cases, the process is incomparably simple and fast since no visible tool is required but a stream of highly focused and coherent light. Microelectro-mechanical systems (MEMS), sometimes referred as microsystem technology (MST), have created a huge opportunity for many diversified applications in miniature form. Microfluidics is one of the fastest growing ...