Chapter 1
Introduction
Chapter Contents
1.1 Philosophy of Micro/Nanofabrication
1.2 The Industry–Science Dualism
1.3 Industrial Applications
1.4 Purpose and Organization of this Book
1.1 Philosophy of Micro/Nanofabrication
Microsystems technology (MST) focuses on the miniaturization of engineering systems to accommodate design specifications of small space, light weight and enhanced portability. An additional advantage of such portable systems is their wide-scale utility in distributed transducer networks. The importance of MST lies, for a large part, in the economical and technical development of innovative systems that it makes possible. The field of microfabrication technology has been established for approximately 50 years ...
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