book

Microfabrication for Industrial Applications

by Regina Luttge

September 2011

Intermediate to advanced

312 pages

8h 50m

English

William Andrew

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1.1 Philosophy of Micro/Nanofabrication1.2 The Industry–Science Dualism1.3 Industrial Applications1.4 Purpose and Organization of this BookREFERENCES
2.1 Photolithography2.2 Thin Films2.3 Silicon Micromachining2.4 Industrially Established Non-Silicon Processing2.5 ConclusionsREFERENCES
3.1 LIGA3.2 Deep Reactive Ion Etching3.3 Micro-Ceramic Processing3.4 Speciality Substrates3.5 Advanced Non-Silicon and Silicon Hybrid Devices3.6 Planar Lightwave Circuits3.7 Fabrication Example of an Integrated Optical Device3.8 Integrated Optics in the MST Foundry Service Industry: A Case Study3.9 ConclusionsREFERENCES

4.1 Top-Down, Bottom-Up4.2 Nanomaterials4.3 Where Are We?4.4 Where to Go from Here?REFERENCES
5.1 Application Fields5.2 Overview of Materials5.3 Thick and Thin Film Hybrid Materials5.4 Microactuation5.5 Packaged Sensors5.6 Silicon as a Mechanical Material in Resonant Microdevices5.7 Information Society5.8 ConclusionsREFERENCES
6.1 Application Field6.2 Sensor Principles for the Collection of (Bio)Chemical Information6.3 Integrated chemFET Device: Case Study of a Semiconductor-Based pH Sensor Development6.4 Integrated Clinical Diagnostics: A Medical Application for Electrochemical Sensor Arrays6.5 ConclusionsREFERENCES
7.1 Application Fields7.2 Microfluidic Components7.3 Controlled Transport by Diffusion7.4 Integration for Microfluidic Transport, Sensing and Dispensing7.5 Lab-on-a-Chip7.6 Device-to-World Connections: The MATAS Concept7.7 From the Lab Bench to Industry: Microchip Capillary Electrophoresis7.8 ConclusionsREFERENCES
8.1 Microneedle Research at University of Twente and its Spin-Off8.2 MNA-4-Insulin: A Brief Evaluation8.3 ConclusionsREFERENCES
9.1 Environmental Aspects9.2 Health Aspects of Nanoparticles9.3 ConclusionsREFERENCES

Content preview from Microfabrication for Industrial Applications

Chapter 9 Reflective Comments and Conclusions

Chapter Contents

9.1 Environmental Aspects

9.2 Health Aspects of Nanoparticles

9.3 Conclusions

References

Many examples of micro-nanofabrication technology are already present all around us but remain unnoticed (or better, are in disguise). In this field of high-tech developments we keep asking when is it time to take a new technology at the nanoscale to industry? Personally, I am convinced that the micro- and nanoworld will penetrate into all areas of application, within technical and biological systems eventually. Like all other engineering processes, their exploitation will bring benefits, however, they may also present us with novel hazards. Scientists must make both aspects of their developments ...