Chapter 5 Hot Embossing

Matthias Worgull

Introduction

A further distribution of applications with integrated micro-features or micro-systems requires technologies to replicate the corresponding micro-structures. In addition to the structuring of silicon, glass or metals by different structuring processes, the replication of micro-structures is based typically on polymers. Polymers, especially thermoplastic polymers, are commercially available and are characterized by a large bandwidth of properties. Here for most applications a suitable polymer which fulfills the requirements of the application can be found.

Hot embossing is one of the established replication technologies for the replication of a micro-structured master, a so-called mold ...

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