Micromanufacturing Engineering and Technology

Index

D

• Deep X-ray Lithography, 202–20

  • Commercial applications, 216–17

    • Micro gears, 217

    • Micro-spectrometer-mold, 217

    • Polymer compound refractive x-ray lenses, 216

  • Design rule, 213–14

  • Features of the LIGA process, 215

  • Introduction, 202–03

  • LIGA manufacturing steps, 203–11

    • Irradiation technology, 205–11

    • Resist deposition, 205

    • Resist technology, 203–05

      • PMMA degradation, 208–09

      • PMMA development, 209–10

      • Special computer programs for X-ray, 210–11

      • Synchrotron source, 205–08

  • LIGA process and its strengths, 203

  • Market, 215–16

  • Mask-technology, 213–14

  • Metrology, 214–15

  • Micro-electroplating technology, 211–13

    • Micro gears - direct metal parts, 217

    • Micro-spectrometer-Mold, 217

    • Polymer compound refractive x-ray lenses, 216

H

• Handling for Micro-Manufacturing, ...