Chapter 4. Fabrication technologies

Chapter Outline

4.1. Silicon-Based Microtechnologies114
4.1.1. Basic technologies115
4.1.1.1. Photolithography115
4.1.1.2. Chemical vapor deposition116
4.1.1.3. Thermal oxidation116
4.1.1.4. Physical vapor deposition117
4.1.1.5. Spin coating118
4.1.2. Single-crystalline silicon119
4.1.2.1. Wet etching120
4.1.2.2. Dry etching123
4.1.2.3. Bulk micromachined microchannels and nanochannels125
4.1.2.4. Epi-micromachining or near-surface micromachining127
4.1.3. Polysilicon128
4.1.3.1. Polysilicon surface micromachining128
4.1.3.2. Fabrication of microchannels with silicon surface micromachining129
4.1.4. Other materials130
4.1.4.1. Diamond thin films130
4.1.4.2. Silicon carbide131
4.2. Polymeric Microtechnologies132
4.2.1. Thick-film ...

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