In a wide range of industries, many applications require much higher precision over a high bandwidth and speed than traditional actuators can deliver. This increase in demand for higher-precision motion control has led to many new innovations, including high-speed Maglev transportation systems, robotics machines, micromanipulation systems, semiconductors, and the use of piezoelectric materials to create motion. Precise actuators are the motion enablers of the motion control system. They utilize a physical interaction to convert an electrical energy into mechanical motion to achieve high speed and high accuracy resolution. Developments of such precise actuators and their control technologies will have an impact on a wide range ...
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