Advanced finishing processes
Abstract
Traditional super finishing processes such as lapping, polishing and honing are commonly used for industry, but there are some limitations such as sub-surface damage, residual stress and difficult to finish complex and free form surfaces. But for achieving damage free, nano-level or angstrom level surface finish on difficult to finish materials such as ceramics, glass, silicon wafer, diamond wafer, sapphire wafer etc., and also for finishing complex and free form surfaces with high accuracy, the advanced super finishing processes are very much needed. Various advanced finishing processes, namely Abrasive Flow Finishing (AFF), Chemical Mechanical Polishing (CMP), Elastic Emission Machining ...
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