Nano Optoelectronic Sensors and Devices

Chapter 6. Packaging Processes for Carbon Nanotube-Based Devices

King Wai Chiu Lai*, Ning Xi*, Carmen Kar Man Fung^† and Hongzhi Chen*

^*Departmentlabel1 of Electrical and Computer Engineering, Michigan State University, Michigan

^†Hong Kong Productivity Council, Hong Kong

Chapter Outline

6.1 Introduction 93

6.2 Thermal Annealing of Carbon Nanotubes 94

6.3 Electrical and Optical Responses of Carbon Nanotubes After Thermal Annealing 96

6.4 Parylene Thin Film Packaging 100

6.5 Electrical and Optical Stability of the CNT-Based Devices After Packaging 101

6.6 Summary 103

References 104

We present a thermal annealing method to control oxygen doping in carbon nanotube (CNT) and polymer-based packaging to improve the stability of related CNT-based devices; these processes ...