Nanoelectronic Device Applications Handbook

10	Investigation of Charge Accumulation in Si3N4/SiO2 Dielectric Stacks for Electrostatically Actuated NEMS/MEMS Reliability Gang Li, Ulrik Hanke and Xuyuan Chen

CONTENTS

10.1  Introduction

10.2  Experiments

10.2.1  Sample Preparation

10.2.2  C–V Measurements

10.3  Results and Discussion

10.3.1  Charge Injection Results

10.3.2  Charge Injection Model

10.3.3  Analysis of Results and Discussion

10.4  Conclusions

References

10.1  INTRODUCTION

Dielectric charging, understood to mean the accumulation of electric charge in the dielectric, constitutes a major failure mechanism that inhibits the commercialization of various electrostatically actuated micro- and nanoelectromechanical systems (MEMS and NEMS) [1]. In such NEMS/MEMS devices containing ...