27

Low-Stress Transfer of Graphene and Its Tunable Resistance by Remote Plasma Treatments in Hydrogen

Waileong Chen, Chia-Hao Tu, Keng-Chih Liang, Chih-Yi Liu, Chuan-Pu Liu and Yonhua Tzeng

CONTENTS

27.1  Introduction

27.2  Experimental

27.3  Results and Discussion

27.4  Conclusion

Acknowledgments

References

27.1  INTRODUCTION

In this chapter, a novel, low-stress process for transferring thermal chemical vapor deposition (CVD) single-layer graphene from copper foils to destination substrates is demonstrated. An efficient transfer of graphene by directly fishing up the graphene with the target substrate rather than by using the “poly(methyl methacrylate) (PMMA)-based transfer” method is reported. Electrical and optical characteristics of ...

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