Chapter 7

MOSFET as a Molecular Sensor

7.1 Introduction

In this chapter, we explore the potential applications of MOSFET structures to the sensing of molecular reactions and explain the operating principles behind these applications. First, for the sake of completeness, we briefly describe the principles of potentiometry and amperometry. The MOSFET devices, which depend on potentiometry, are then extensively explained with the ISFET structure as a model device.

7.1.1 Potentiometry vs. Amperometry

The (bio)chemical sensors [1, 2] used for electrical signal detection either detect the electric charges directly or else detect the electric field through electric charges. The former type is called the “amperometric sensor,” and the latter is the “potentiometric ...

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