Nanoscale Semiconductor Memories

12	Nonvolatile Memory Device Resistive Random Access Memory Peng Zhou, Lin Chen, Hangbing Lv, Haijun Wan, and Qingqing Sun

CONTENTS

12.1  Introduction

12.1.1  Resistive Random Access Memory: History and Emerging Technology

12.1.2  Challenge for RRAM on Storage-Class Memory

12.2  Binary Transitional Metal Oxide-Based RRAM

12.2.1  Device Fabrication and Current–Voltage Characterization

12.2.1.1  Device Fabrication

12.2.1.2  Current–Voltage Characterization

12.2.2  BTMO-RRAM Integration for Embedded Application on 0.18 μm Al Process and 0.13 μm Cu Process

12.2.2.1  RRAM Integration on 0.18 μm Al Process

12.2.2.2  RRAM Integration on 0.13 μm Cu Process

12.2.3  Doping Effect in BTMO-RRAM

12.2.4  Role of Compliance Current

12.2.5  Physical Mechanism ...