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Novel Advances in Microsystems Technologies and Their Applications by Krzysztof Iniewski, Laurent A. Francis

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6

Thin-Film Transistors Fabricated on Intentionally Agglomerated, Laser-Crystallized Silicon on Insulator

Themistokles Afentakis

CONTENTS

6.1      Introduction

6.2      Experimental

6.2.1      Excimer Laser Agglomeration of Si

6.2.1.1      Uncapped Si Films on Quartz

6.2.1.2      Si Films on Quartz Capped with SiO2

6.2.2      Thin-Film Transistor Fabrication

6.3      Results

6.4      Discussion

6.5      Improving Si Morphology

6.6      Conclusions

References

6.1    INTRODUCTION

Laser-induced melting and recrystallization of silicon films, typically referred to as laser crystallization, have been established as the preferred method to obtain high-mobility silicon metal-oxide-semiconductor field-effect transistors (MOSFETs) on glass substrates. ...

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