Novel Advances in Microsystems Technologies and Their Applications

11	Thin-Film Sensors Mutsumi Kimura

CONTENTS

11.1    Introduction

11.2    p/i/n Thin-Film Phototransistor

11.2.1    Fabrication Processes and Device Structures

11.2.2    Comparison of Thin-Film Photodevices

11.2.3    Device Characterization of the p/i/n Thin-Film Phototransistor

11.3    Artificial Retina

11.3.1    Artificial Retina with the p/i/n Thin-Film Phototransistors

11.3.2    Artificial Retina Driven Using Wireless Power Supply

11.4    Temperature Sensor

11.4.1    Fabrication Processes and Device Structures

11.4.2    Temperature Dependences of Transistor Characteristics

11.4.3    Cell Circuit and Driving Method

11.4.4    Experimental Results

11.5    Conclusion

References

11.1  INTRODUCTION

Thin-film transistors (TFTs) [1,2] have been ...