Plasma Processing of Nanomaterials

12

Diagnostics of Energy Fluxes in Dusty Plasmas

Horst R. Maurer

Holger Kersten

CONTENTS

12.1  Introduction: Diagnostics of Reactive Dusty Plasmas

12.2  Methods for the Determination of Particulate Temperature in Plasmas

12.3  Experiments: How to Use Special Luminescent Particles to Access the Energetic Conditions in a Dusty Plasma

12.4  Experimental Determination of Particle Temperatures under Dusty Plasma Conditions

12.5  A Simple Model for the Energy Balance of a Spherical Microparticle in the Plasma Sheath

12.6  Use of Microparticles as Tiny Calorimetric Probes in Process Plasmas

12.7  Summary and Conclusion

Acknowledgment

References

12.1  Introduction: Diagnostics of Reactive Dusty Plasmas

Today, plasma technology is a key feature in ...