Printed thick-film capacitive sensors
V. Ferrari, University of Brescia, Italy
M. Prudenziati, University of Modena and Reggio Emilia, Italy
Abstract:
Capacitive sensors and microsystems based on films printed on different substrates, including alumina, steel and silicon, are reviewed. Screen printing is the prevalent film deposition method considered, though other techniques based on direct writing are also referred to. Principles and configurations of capacitive sensors based on geometrical and permittivity variations are described, and examples are given of thick-film sensors for the measurement of physical and chemical quantities.
Key words
thick-film sensors
capacitive sensors
pressure sensors
interdigitated electrodes ...
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