Scientific Photography and Applied Imaging

14 Micro-imaging

14.1 Introduction

A number of important industrial and commercial processes involve the production of detailed images of very small size. An early definition of microphotography was ‘the making of microscopically small reproductions (photos) of objects or drawings by optical reduction’. Today, methods other than the photographic process are used and the term microimaging is more general. Several subgroupings are identified:

Microphotography is the production of images such as reticles, graticules and ‘microdots’ (Stevens, 1988), together with specimen grids for electron micrography by microphotofabrication, and arrays of test target patterns for the testing of lenses and optical systems by projection methods.

Microlithography ...