Semiconductor gas sensors for chemical warfare agents
J.-C. Kim, Kyungpook National University, Korea
A brief overview is given for a variety of sensors for the detection of chemical warfare agents (CWA): semiconductor thick- or thin-film gas sensors with oxide and noble metal additives, surface acoustic wave (SAW) sensors with a polymer membrane, and an ion mobility sensor (IMS). This is followed by discussion on the preparation methods for the sensing materials employed in semiconducting devices, and SAW sensors are introduced. The chapter closes with the results and observations from the examination and study of these devices.
chemical warfare agents (CWA)