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Semiconductor Gas Sensors by O Tan, R Jaaniso

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15

Integrated complementary metal oxide semiconductor-based sensors for gas and odour detection

P.K. Guha and S. Santra,     Indian Institute of Technology, Kharagpur,India

J.W. Gardner,     University of Warwick, UK

Abstract:

This chapter addresses both the challenges and benefits of fabricating gas sensors using complementary metal oxide semiconductor (CMOS) technology and the integration of associated circuitry onto a single silicon chip. The main objective described here is, specifically, the development of ultra-low power (~ mW) resistive and calorimetric gas sensors that can operate at high temperatures (up to 600 °C) on a CMOS platform. This compatibility with the standard CMOS manufacturing process will permit high volumes of production ...

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