Sensors for Next-Generation Electronic Systems and Technologies

Chapter 3 MEMS-based electrochemical gas sensor

Yasaman Heidari, Mahshid Padash and Mohammadreza Faridafshin

Shahid Bahonar University of Kerman, Kerman, Iran

DOI: 10.1201/9781003288633-3

Contents

1. 3.1 Introduction
2. 3.2 Gas sensors classification
   • 3.2.1 Mass-sensitive gas sensors
   • 3.2.2 Optical gas sensors
   • 3.2.3 Thermometric sensor
   • 3.2.4 Electrochemical sensors
3. 3.3 Fabrication materials
4. 3.3.1 Metal oxide semiconductors
5. 3.3.2 Graphene
6. 3.3.3 Composite materials (CM)
7. 3.4 MEMS electrochemical gas sensor
8. 3.5 Structure
9. 3.6 Fabrication of MEMS gas sensors
10. 3.7 Application
11. 3.8 Conclusion
12. References

3.1 Introduction

There are various types of gas molecules (natural and artificial) that form the atmosphere around us. Some of them are a necessity to breathe, ...