335

      








         












dimensional molecular dynamics simulation.

Figure 7.6 



Introduction of Strain into Nanowire Channels by Oxidation
336
Electrical Transport Properties of Doped Silicon Nanowires
7.4 Electrical Characterization of Nanowire FETs
7.4.1 Effects of Stress on Carrier Transport in Nanowire
FETs
          



           
    χ     
         



        
by cyclotron resonance measurements.

  


1
1

m
mm
mm
t
t
.
.
()
=
-+gg
where
m
c
γ is the directional cosine
k

m
t
m
l
is the longitudinal
m
t
and m
l
are
mmmm
t0l
=n=01
0
 
where m
0


6
)
          


6

) along
the k

4
) in k
x
k
y




         


  



l

m
t


4
has m
t

and m
t
+ m
l

337


4


       


4


4


    
   

4



4






     
sub-band energy lowering


4
is larger

      

      
4


7.4.2 Electrical Characterization
7.4.2.1 Potential distribution inside the nanowire channels

        




II





W and t



           
11
cm

V
bg

          


Electrical Characterization of Nanowire FETs
338
Electrical Transport Properties of Doped Silicon Nanowires


Figure 7.7 
       
y    
x          

 
  

7.4.2.2 I–V characteristics of nanowire FETs

 
  
I
ds
V
bg
characteristics for both n
   p     
seen that the drain current (I
ds

gate bias (V
bg
I
ds

increases as V
bg
     
      
(g
m
W
b
and t

as determined from the cross-
g
m
obtained from
       

  


–8


S/





g
m

g
m



339
Figure 7.8 I
ds
V
bg
characteristics of (a) p    
n


    g
m
    
circles denote the corrected g
m
    
         g
m
in each
       g
m
   
  

  

  
–8

    

  

 


g
m



Figure 7.9 Values of g
m
pn
 g
m

        g
m
in each

         

Electrical Characterization of Nanowire FETs

Get Silicon and Silicide Nanowires now with O’Reilly online learning.

O’Reilly members experience live online training, plus books, videos, and digital content from 200+ publishers.