Silicon-On-Insulator (SOI) Technology

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Woodhead Publishing Series in Electronic and Optical Materials

Introduction

Part I: Silicon-on-insulator (SOI) materials and manufacture

1. Materials and manufacturing techniques for silicon-on-insulator (SOI) wafer technology

Abstract:

1.1 Introduction

1.2 SOI wafer fabrication technologies: an overview

1.3 SOI volume-fabrication process

1.4 SOI wafer structures and characterization

1.5 Direct wafer bonding: wet surface cleaning techniques

1.6 Characterization of direct bonding mechanisms

1.7 Alternative surface preparation processes for Si and SiO₂ direct bonding

1.8 Mass production of SOI substrates by ion implantation, bonding and splitting: Smart Cut™ technology ...