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Silicon-on-insulator (SOI) technology for micro-electromechanical systems (MEMS) and nano-electromechanical systems (NEMS) sensors

K. Mori,    Institute of Microelectronics, Singapore

Abstract:

This chapter discusses how to fabricate micro-electromechanical systems and nano-electromechanical systems (MEMS/NEMS) sensors with silicon-on-insulator (SOI) technologies. The chapter first reviews the operating principles of MEMS/NEMS sensors and how SOI wafers can help to simplify sensor design and manufacturing of the MEMS/NEMS. The chapter then discusses the design of sensor devices with detailed processing technologies, and provides some examples of the process flows for mass production of MEMS/NEMS sensors.

Key words

SOI; MEMS; NEMS; sensor; process ...

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