Smart Sensors and MEMS, 2nd Edition

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Smart temperature sensors and temperature sensor systems

Gerard C.M. Meijer^1,4, Guijie Wang^1,3, and Ali Heidary^{1,2,3     1}Delft University of Technology, Delft, The Netherlands     ²Guilan University, Rasht, Iran     ³Smartec, Breda, The Netherlands     ⁴SensArt, Delft, The Netherlands

Abstract

For temperature sensing in smart sensors and microelectromechanical systems (MEMS), the most commonly used elements are transistors, thermocouples, and thermopiles because these elements can be implemented with integrated circuit (IC) technology. At the system level, also other sensor elements are used. A comparison between different types of sensing elements is presented.

For the temperature range of −55 to 150°C, bipolar junction transistors are very suited ...