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Smart temperature sensors and temperature sensor systems

Gerard C.M. Meijer1,4, Guijie Wang1,3, and Ali Heidary1,2,3     1Delft University of Technology, Delft, The Netherlands     2Guilan University, Rasht, Iran     3Smartec, Breda, The Netherlands     4SensArt, Delft, The Netherlands

Abstract

For temperature sensing in smart sensors and microelectromechanical systems (MEMS), the most commonly used elements are transistors, thermocouples, and thermopiles because these elements can be implemented with integrated circuit (IC) technology. At the system level, also other sensor elements are used. A comparison between different types of sensing elements is presented.

For the temperature range of 55 to 150°C, bipolar junction transistors are very suited ...

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