Advanced silicon radiation detectors in the vacuum ultraviolet and the extreme ultraviolet spectral range
Abstract
In this chapter, the numerous challenges in reliable measurement of vacuum ultraviolet (VUV) and extreme ultraviolet (EUV) radiation with silicon radiation detectors will be discussed. The most severe issue is the high absorbance of any kind of material in these spectral ranges, which poses stringent requirements on possible detector designs. In particular, a high value of the spectral responsivity and the necessary radiation hardness put contradicting demands on the devices. To find a solution, it is necessary to describe and understand ...
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