Microfabrication technologies used for creating smart devices for industrial applications

José M. Quero, Francisco Perdigones, and Carmen Aracil     Universidad de Sevilla, Seville, Spain


The purpose of this chapter is to provide the reader with a general overview of microsystems technology. It introduces the design and process flow in the microfabrication of a device: the materials used in the microfabrication, the essential microfabrication processes, and the simulation tools involved in the design toward smart devices.


Bonding; Deposition; Etching; Microelectromechanical systems (MEMS); Microfabrication; Microsystems; Photolithography; Photoresist; Polymers; Silicon; Simulation

11.1. Introduction

Microelectromechanical systems ...

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