11
Microfabrication technologies used for creating smart devices for industrial applications
José M. Quero, Francisco Perdigones, and Carmen Aracil Universidad de Sevilla, Seville, Spain
Abstract
The purpose of this chapter is to provide the reader with a general overview of microsystems technology. It introduces the design and process flow in the microfabrication of a device: the materials used in the microfabrication, the essential microfabrication processes, and the simulation tools involved in the design toward smart devices.
Keywords
Bonding; Deposition; Etching; Microelectromechanical systems (MEMS); Microfabrication; Microsystems; Photolithography; Photoresist; Polymers; Silicon; Simulation
11.1. Introduction
Microelectromechanical systems ...
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