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Dynamic behavior of smart microelectromechanical systems in industrial applications

Marius Pustan1, Corina Birleanu1, Cristian Dudescu1, and Jean-Claude Golinval2     1Technical University of Cluj-Napoca, Cluj-Napoca, Romania     2University of Liège, Liège, Belgium

Abstract

Many of the microelectromechanical systems (MEMS) industrial applications require vibrating components that operate to a high-quality factor and small energy dissipation during oscillations. To improve the reliability design of MEMS resonators, the effect of operating conditions on the dynamical response of vibrating components has to be accurately determined. As a function of the operating conditions, the dynamical response and the loss of energy in vibrating MEMS components ...

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