Technologies for Smart Sensors and Sensor Fusion

12	Zeolite Transformation Layers in Discriminating Metal Oxide Semiconductor Gas Sensors

Russell Binions

CONTENTS

12.1    Introduction

12.1.1    Brief Introduction to MOS

12.1.2    Model for Gas Interaction: p-Type Sensor Response

12.1.3    Equivalent Circuit Model

12.1.4    Screen-Printing

12.1.5    What Are Zeolites?

12.1.6    Other Groups Working in This Area

12.2    Experimental Preparation

12.2.1    Materials Processing

12.2.2    Materials Characterization

12.2.3    Sensor Characterization and Testing

12.2.4    Theoretical Concerns: Diffusion-Reaction Modeling

12.3    Results

12.3.1    Increasing Discrimination

12.3.2    Analyte-Tuned Gas Sensors: Ethanol

12.3.3    Analyte-Tuned Gas Sensors: Nitrogen Dioxide

12.3.4    Diffusion-Reaction ...