The Electrical Engineering Handbook

6

Production and Utilization of Micro Electro Mechanical Systems

David J. Nagel and Mona E. Zaghloul,     Department of Electrical and Computer Engineering, The George Washington University, Washington, D.C., USA

6.1. Introduction

6.2. Overview of MEMS

6.3. From Design to Reliable MEMS Devices

6.3.1. Design and Simulation

6.3.2. Materials and Processes

6.3.3. Fabrication Foundries

6.3.4. Packaging and Testing

6.3.5. Reliability

6.4. Diversity of MEMS Applications

6.4.1. MEMS: Structures

6.4.2. MEMS: Sensors

6.4.3. MEMS: Actuators

6.4.4. Integrated MEMS: Systems

6.5. Summary

Appendix: Books on MEMS

References

6.1 Introduction

Many micro electro mechanical systems (MEMS) devices are now on the market. They are available for use ...