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Thin Film Growth by Z Cao

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1

Measuring nucleation and growth processes in thin films

Y. Homma,     Tokyo University of Science, Japan

Abstract:

This chapter focuses on the observation of crystal growth processes by tracking the motion of atomic steps, which are the growth front of the crystal. After reviewing the theoretical model for atomic step motion, the chapter discusses atomic step imaging by scanning electron microscopy, and reveals basic growth modes using this technique: two-dimensional-island nucleation and step-flow modes both in growth and evaporation, and morphological instability of atomic steps between these two modes.

Key words

atomic steps

scanning electron microscopy

molecular beam epitaxy

step flow

island nucleation

1.1 Introduction

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