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Modelling thin film deposition processes based on real-time observation

S. Kowarik,     Humboldt Universität zu Berlin, Germany

A. Hinderhofer, A Gerlach and F. Schreiber,     Universität Tübingen, Germany

Abstract:

we introduce time and length scales of growth processes and then review experimental techniques for real-time and in-situ studies. In particular, we discuss optical monitoring techniques, time resolved microscopy, and real-time scattering techniques (X-ray, He-, and electron scattering). For scattering experiments we discuss details of the analysis, in particular anti-Bragg growth oscillations as observed in X-ray- and He-scattering as well as RHEED. we illustrate real-time observation and modelling of thin film deposition ...

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