O'Reilly logo

Thin Film Growth by Z Cao

Stay ahead with the world's most comprehensive technology and business learning platform.

With Safari, you learn the way you learn best. Get unlimited access to videos, live online training, learning paths, books, tutorials, and more.

Start Free Trial

No credit card required

8

Thin film growth for thermally unstable noble-metal nitrides by reactive magnetron sputtering

Z. Cao,     Chinese Academy of Sciences, P. R. China

Abstract:

Thin film growth for thermally unstable noble-metal nitrides by reactive magnetron sputtering is exemplified by the deposition of stoichiometric Cu3N and ternary Cu3NPdx structures, for which a proper combination of applied voltage and working gas pressure is critical since the nitriding reaction occurs at the target surface. Nitrogen re-emission from deposits both influences the growth process and leads to protruding features via an orogenic motion mechanism of the nitride nanocrystals. Doping the cubic Cu3N lattice gives rise to narrow band semiconductors which may exhibit various ...

With Safari, you learn the way you learn best. Get unlimited access to videos, live online training, learning paths, books, interactive tutorials, and more.

Start Free Trial

No credit card required