8

Thin film growth for thermally unstable noble-metal nitrides by reactive magnetron sputtering

Z. Cao,     Chinese Academy of Sciences, P. R. China

Abstract:

Thin film growth for thermally unstable noble-metal nitrides by reactive magnetron sputtering is exemplified by the deposition of stoichiometric Cu3N and ternary Cu3NPdx structures, for which a proper combination of applied voltage and working gas pressure is critical since the nitriding reaction occurs at the target surface. Nitrogen re-emission from deposits both influences the growth process and leads to protruding features via an orogenic motion mechanism of the nitride nanocrystals. Doping the cubic Cu3N lattice gives rise to narrow band semiconductors which may exhibit various ...

Get Thin Film Growth now with the O’Reilly learning platform.

O’Reilly members experience books, live events, courses curated by job role, and more from O’Reilly and nearly 200 top publishers.