H. Guclu, University of Pittsburgh, USA,
T. Karabacak, University of Arkansas at Little Rock, USA
M. Yuksel, University of Nevada – Reno, USA
We present a new network modeling approach for various thin film growth techniques that incorporates re-emitted particles due to the non-unity sticking coefficients. We model re-emission of a particle from one surface site to another as a network link, and generate a network model corresponding to the thin film growth. Monte Carlo simulations are used to grow films and dynamically track the trajectories of re-emitted particles. We performed simulations for normal incidence, oblique angle, and chemical vapor ...