Thin Film Growth

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Network behavior in thin films and nanostructure growth dynamics

H. Guclu,     University of Pittsburgh, USA,

T. Karabacak,     University of Arkansas at Little Rock, USA

M. Yuksel,     University of Nevada – Reno, USA

Abstract:

We present a new network modeling approach for various thin film growth techniques that incorporates re-emitted particles due to the non-unity sticking coefficients. We model re-emission of a particle from one surface site to another as a network link, and generate a network model corresponding to the thin film growth. Monte Carlo simulations are used to grow films and dynamically track the trajectories of re-emitted particles. We performed simulations for normal incidence, oblique angle, and chemical vapor ...