image (4.54)

α=0.8+0.1945(SD)0.52, (4.55)

image (4.55)

β=β12e0.3yg+β2, (4.56)

image (4.56)

β1=2.1+4e0.375gD0.1, (4.57)

image (4.57)

β2=e0.21gD+0.60.57. (4.58)

image (4.58)
Figure 4.13 Mutual inductance L21 between two 3-D vias with different lengths (D=10 µm, ...

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