Three-Dimensional Integrated Circuit Design, 2nd Edition

(4.54)

$\alpha =0.8+0.1945{\left(\frac{S}{D}\right)}^{0.52},$ (4.55)

(4.55)

$\beta ={\beta }_1-2e^{-0.3\frac{{ℒ}_y}{{ℒ}_g}+{\beta }_2},$ (4.56)

(4.56)

${\beta }_1=2.1+4e^{-0.375\frac{{ℒ}_g}{D}-0.1},$ (4.57)

(4.57)

${\beta }_2=e^{-0.21\frac{{ℒ}_g}{D}+0.6}-0.57.$ (4.58)

(4.58)

Figure 4.13 Mutual inductance L₂₁ between two 3-D vias with different lengths (D=10 µm, ...